Tokyo Electron Tel batch furnace TELFORMULA

Wafer size (mm) 300
Cassette stocker -10
Process temp RT-1100C
Additional features, Option N2/LL Gas cleaning
Product description: Tokyo Electron Tel batch furnace TELFORMULA, Wafer size (mm) 300, Cassette stocker -10, Process temp RT-1100C, Additional features, Option N2/LL Gas cleaning

Tokyo Electron Tel batch furnace TELFORMULA

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Tokyo Electron Tel batch furnace TELFORMULA

TELFORMULA is the semiconductor industry’s most advanced iso-thermal minibatch platform. TELFORMULA™ incorporates a number of innovative technologies

specifically developed to address the industry’s need for a 300mm high speed batch platform capable of delivering short TAT (Turn Around Time) both suitable for product

development and simultaneously capable of meeting demanding, high-volume production requirements. The short TAT is achieved by the convergence of multiple new core

technologies, such as a metal-free fast ramping heater, low thermal mass chamber, rapid gas volume purge/displacement and a high speed wafer handling unit. The all quartz

reactor concept provides the ideal processing environment for attaining the ultimate level of cleanness which is maintained by in-situ chamber dry gas cleaning reducing maintenance downtime and related costs. TELFORMULA™ is the ideal platform for a wide variety of semiconductor processes including LPCVD Si (Poly, a-Si), Si3N4, SiO2, ALD High-k, ATM/LP Oxidation, Oxynitridation, etc.

Item	TELINDY PLUS	TELFORMULA	TELINDY	ALPHA-8S
Wafer size (mm)	300	300	300	150,200
Availability	New, Certified used	Certified used	Certified used	Certified used
Production load max	-125	-50	-125	-150
Cassette stocker	-18	-10	-16	-21
Process	Thermal ALD, LPCVD, Oxididation/Anneal	Oxide, Anneal, Nitride, Poly, TEOS, High-k	Oxide, Anneal, Nitride, Poly, TEOS, HTO, High-k	Oxide, Anneal, Nitride, Poly, TEOS, HTO
Reactor	Thermal	Thermal	Thermal/Plasma	Thermal
Reactor	Thermal	Thermal	Thermal/Plasma	Thermal
Process temp	RT-1100C	RT-1000C	RT-1100C	RT-1250C
Additional features, Option	N2/LL Gas cleaning	N2/LL Gas cleaning	N2/LL Gas cleaning Advance platform	N2/LL, Gas cleaning: CIF3 for poly

Keyword:

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FAQ
1) This is the first time I use this kind of machine, is it easy to operate?
There is English manual or guide video that show you how to use machine.
If you still have any question, please contact us by e-mail / skype/ phone /trademanager online service.
2) If machine have any problem after I receive it, how can I do ?
Free parts send to you in machine warranty period.
If the part is less than 0.5KG, we pay the postage.
If it exceeds 0.5KG, you need to pay the postage.
3) MOQ ?
1 set machine, mixed order is also welcomed.
4) How can I buy this machine from you? ( Very easy and flexible !)
A. Consult us about this product on line or by e-mail.
B. Negotiate and confirm the final price , shipping , payment methods and other terms.
C. Send you the proforma invoice and confirm your order.
D. Make the payment according to the method put on proforma invoice.
E. We prepare for your order in terms of the proforma invoice after confirming your full payment.
And 100% quality check before shipping.
F.Send your order by air or by sea.
5)Why choose us ?
A. Gold supplier on Alibaba !
B. Trade assurance to US$54,000 !
C. Best price & Best shipping & Best service !